MEMS and Microsensors
Professor: Giacomo
Langfelder
Teaching Assistants: Giorgio Mussi, Cristiano R. Marra
The aim of the course is to introduce the basic concepts of some types
of electronic devices which allow to acquire physical chemical and
biological information from the outside world and also to act on it on
it at microscopic level. The attention is focused on the operating
principles of
optical image sensors and of MicroElectroMechanicalSystems (MEMS).
Their integration in more complex systems is also considered. The
performances of these devices are discussed with particular reference
to their biomedical applications. Classworks about specific
casestudies as well as experimental laboratory activity are foreseen.
News and Communications
Welcome folks, in this page you will find the slides and the detailed and discussed solutions of numerical exercise!
The most updated course
schedule is always available here!
NOTE:
the last class cannot be held on Thursday 20th, due to extension of
graduations through the afternoon. We will give this (facultative) last
numerical exercise on Wednesday 19th, 4.30 PM to 6 PM, and we will be
available for Q&A. Provisional room is Beta, Ed. 24, via Golgi 40.
Helpful slides, reviewing basics of electronics for nonelectronic students, and focusing on the purpose of the course, have been added! Check further below on this page!
During the classes I will sometimes show results of some Finite Element Method (FEM)
simulations. The corresponding videos are available here (now available also as GIF images).
Slides of the course
C01 Course Introduction
C02 MEMS Technology C03 MEMS Spring Mass Damper C04 MEMS Accelerometer Part 1 C05 MEMS Accelerometer Part 2 C06 MEMS Accelerometer Part 3 C07 MEMS Accelerometer Part 4 C08 MEMS Resonator Part 1 C09 MEMS Resonator Part 2 C10 MEMS Resonator Part 3 C11 MEMS Gyroscope Part 1 C12 MEMS Gyroscope Part 2 C13 MEMS Gyroscope Part 3 C14 MEMS Gyroscope Part 4 C15 MEMS Gyroscope Part 5 C16 MEMS Gyroscope Part 6 C17 MEMS Magnetometer Part 1 C18 MEMS Magnetometer Part 2 C19 MEMS Magnetometer Part 3 C20 MEMS Characterization Part 1 C21 MEMS Characterization Part 2
C22 CMOS Sensors Basics Part 1 C23 CMOS Sensors Basics Part 2 C24 CMOS APS3T Part 1 C25 CMOS APS3T Part 2 C26 CMOS APS3T Part 3 C27 CMOS APS4T Part 1 C28 CMOS APS4T Part 2
Exercises
E01 Accelerometer Design E02 Accelerometer Readout E03 Torsional Accelerometer E04 CAD Perfofated Capacitor E05 Resonator Design E06 Oscillator Design E07 Gyroscope Mechanical Design E08 Gyroscope Drive Design E09 Gyroscope Sense Design E10 Magnetometer design E11 Magnetometer readout E12 Microphone design E13 CAD MEMS accelerometer E14 CAD gyroscope redesign
E15 Photocurrent E16 SNR E17 CAD pixel E18 DR E19 PTC and 4T APS
E20 Exam simulation
Review of basic electronics (focused for nonelectronic students)
B01 photodiodes B02 MOS noise B03 eln basics
Seminars
S01 MEMS clocks: small footprint timekeeping S02 MEMS gyroscopes: design overview and market trends
Exams Text
and Solution (use them for practice during exam preparation)
03/02/2016  Text and Solution
17/02/2016  Text and Solution
11/07/2016  Text and Solution
13/09/2016  Text and Solution
27/09/2016  Text and Solution 30/01/2017  Text and Solution 16/02/2017  Text and Solution 03/07/2017  Text and Solution 18/07/2017  Text and Solution 08/09/2017  Text and Solution 31/01/2018  Text and Solution 21/02/2018  Text and Solution 28/06/2018  Text and Solution 13/07/2018  Text and Solution 09/03/2018  Text and Solution 09/01/2019  Text and Solution 31/01/2019  Text and Solution
MATLAB
Scripts
MATLAB routine #1 for
sample Root Allan Variance visualization with different white noise,
1/f noise and offset drift. Enjoy... MATLAB routine #2 for
sample Photon Transfer Curve visualization as a function of different active pixel parameters. Enjoy...
Cadence Files
Cadence Tar file for Cad exercise on APS

