Instrumentation for the generation of physical quantities

 

Micro-Magnetics 3-axis magnetic field generator

Magnetic Field Generator The instrument is based on Helmholtz coils with capability of generating DC or slowly ramping fields up to 70 G (7 mT) and AC fields up to 20 G (2 mT) and 200 Hz frequency.
The instrument, featuring a reference sensor, is capable to compensate the Earth magnetic field. The guaranteed resolution in magnetic field setting is lower than 300 nT.
It is thus suited for characterization, calibration and qualification of magnetic field sensors for consumer and automotive applications.

Acutronic rate table with z-axis and y-axis mounting capabilities

Rate Table The instrument generates accurate angular rates along a single axis (the vertical axis), with a maximum full-scale of 3000 dps and a maximum frequency of 500 Hz (at a few tens dps).
A custom mounting of sensors in the vertical direction allows obtaining Y-axis rate testing capabilities.

The instrument is completed by automatic software for the generation and control of angular rates, and for dedicated characterization measurements of gyroscopes (sensitivity, power spectral density, Allan variance, bandwidth and real-time motion capture).

MEMS ultrasonic transducers and characterization station

CMUT The setup features 2D in-plane automatic motion controller with micrometric precision and a ULTRAN ultrasound transducer for characterization of CMUTs and PMUTs in the range 100 kHz – 10 MHz. Vertical displacement can be obtained through manual micrometric regulators.
The setup includes as well custom-developed boards for the generation of pulses and burst and for the readout from capacitive or piezoelectric membranes.
Emission efficiency, detection sensitivity, absorption and beam profiling as a function of the position are typical measurement allowed by the setup.

Bruel&Kjaer 20 kHz vibrating shaker

ShakerT The instrument is capable of generating vibration amplitudes up to a few g (gravity units) at frequencies up to 20 kHz.
Higher frequencies at smaller amplitudes are possible as well. The setup also features a closed-loop system to set the desired vibration amplitude and to obtain it through a reference precision accelerometer.
It is thus possible to characterize the response of accelerometers in terms of sensitivity and bandwidth, as well as the immunity of other MEMS devices (gyroscopes, magnetometers) to large vibrations in a frequency range that fully covers consumer and automotive requirements.

Dedicated instrumentation for MEMS

ITmems MEMS Characterization Platform

MEMS Characterization Platform The instrument is dedicated to the electromechanical characterization of MEMS sensors. Without the need of any interface board, it easily delivers relevant information about the MEMS under test (rest capacitance, stationary CV curves with pull-in and pull-out, resonance frequency and Q factor time-domain and frequency-domain analysis).

Dedicated LabVIEW routines are developed for the characterization of fatigue, adhesion phenomena, quadrature error evaluation in gyroscopes, and nonlinearity characterization of resonant structures.

The system includes the generation of single-ended or push-pull driving stimuli up to 40 V and 500 kHz, and a differential capacitive or piezoresistive readout.
 
SanDLab NEWS
02-05-2016 "A 3-D Micromechanical Multi-Loop Magnetometer Driven Off-Resonance by an On-Chip Resonator" by G.Laghi et al. has been accepted for publication! Congratulations to all the co-authors!

01-07-2015 Three new instruments to complete the SandLab equipment for inertial sensor characterization! A 50 V high-resolution MCP by ITmems, a 50 MHz Lock-in amplifier by Zurich Instrument, and a new vibrating shaker from B&K!

01-07-2015. Two SandLab articles accepted for publication in the Journal of MEMS: "In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection" by S. Dellea et al., and "A sub-400 nT/√Hz, 775 μW, multi-loop MEMS Magnetometer with Integrated Readout Electronics" by P. Minotti et al. Congratulations to all the co-authors! We look forward to see the published version!

MEMS
NIRVANA - EU Project

01-09-2011. SanDLab started a new challenging project part of the Seventh Framework Programme of the European Union. This project goes under the acronym of NIRVANA.
MEMS
Lab4MEMS

01-01-2013. SanDLab started a new challenging project part of the ENIAC framework.